PVD Process engineer at GLOBALFOUNDRIES
I am a PVD process engineer at ON Semi's East Fishkill Fab responsible for front end of line and middle of line metal deposition tools. I own AMAT metal deposition and preclean chambers including sputter and reactive preclean, CVD, ALD and PVD Ti/TiN/Co/Ni/W. I also own LAM Altus CVDW chambers and provide backup coverage for AMAT and LAM BEOL Cu liner toolsets.
Process development/R&D for novel film
I designed and performed a full process characterization of a first of a kind film with unique and demanding specifications. I lead the insallation of 9 process chambers including one chamber for a film that had never been manufactued before and 2 chamber types that are new to our factory. I collaborated with our customer, the vendor AMAT and our local integration and metrology teams to measure the films and tune them to meet the device requirements
Development of metal stack and films for nano-capacitor
I worked with integration engineers to identify films that could be used for a new 3-D capacitor. Then I ran experiments and analyzed TEMs to optimize the film performance.
Development of lower stress CVD film
New technologies in the fab required a lower stress film. I used my process knowledge to develop a film with lower stress but otherwise matching properties.
Altus CVD Tungsten Process Characterization and Improvement
I performed extensive physical failure analysis to identify process cause of a yield issue and identified the harware root cause of the process issue with extensive hardware and process testing. Then I implemented a hardware root cause fix and new controls to detect issues in the future. Following the resolution of the issue I performed process window analysis and presented the results to a company wide audience.
Abnormal event reduction for CVD process tools
I used six sigma principals to reduce tool erros on my fleet 70%. After the success of this project I used R to develop metrics to roll this process out to other engineers on site.
Fab automation projects
I integrated multiple fab systems to automate a manual post PM process leading to a 5% productivity improvement. I led a cross functional team to develp test and document an automated processes to code tools to the correct states. I ran experiments to identify the best metrology method to perform automated process feedback. Then I worked with the fab systems and metrology engineers to automate and sutain this process allowing tools to come back to production more quickly.
New tool Qualifications
I lead multi-million dollar process qualifications on multiple Altus CVDW and AMAT PVD and CVD chambers and mainframes.
Cost savings projects
I've lead a series of cost savings projects including new part and new material qualifications as well as shelf life and useage extensions.
QDMS Core Team
I was one of the members of a 10 person team that developed a new managment system for globalfoundries fab 10. Responsibilitys and contributiuons included going on gosee across company to other fabs, developing systems, coming up with template and buisness process and rolling the process out to team